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Unique beam shape control coupled with SuperScan 3 technology reduces device variability, while superior particle performance boosts production yields
June 30, 2014
By: DAVID SAVASTANO
Editor, Ink World Magazine
Applied Materials, Inc. announced the Applied Varian VIISta 900 3D system, a state-of-the-art medium-current ion implantation tool developed for manufacturing FinFET and 3D NAND designs at sub-2x nanometer nodes. This system features innovations in precision materials engineering that deliver unprecedented levels of control needed to improve device performance, reduce variability and boost yields of increasingly complex high-performance, high density 3D devices. The VIISta 900 3D system offer...
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